FORCE SENSORS | | | | | | |
Revolving Measurement Unit (RMU) up to 6 sensors (kgf) | 100 | 200 | 10 | 200 | 200 |  |
Single Measurement Unit (SMU) 1 sensor up to (kgf) | 100 | 200 | 10 | 200 | 200 | 1000 |
STAGES | | | | | | |
X-stage (mm) | 168 | 370 | 500 | 600 | 500 | 500 |
Y-stage (mm) | 168 | 168 | 370 | 168 | 500 | 500 |
Z-stage (mm) | 168 | 168 | 90 | 168 | 200 | 200 |
Axis speed (mm/s) | 5 | 50 | 50 | 50 | 500 | 500 |
Resolution linear encoders (backlash free drives) (nm) | 30 | 30 | 30 | 30 | 10 | 10 |
Digital temperature correction |  |  |  |  |  |  |
ACCURACY | | | | | | |
Accuracy (%) | 0.2 | 0.075 | 0.075 | 0.075 | 0.075 | 1 |
ADC resolution (bit) | 16 | 24 | 24 | 24 | 24 | 24 |
Sampling frequency (kHz) | 2 | 10 | 10 | 10 | 10 | 10 |
Shear height (step back) accuracy ±1 μm |  |  |  |  |  |  |
Programmable landing force down to 5 gf |  |  |  |  |  |  |
1° sensor rotation resolution |  |  |  |  |  |  |
Tool rotation accuracy ±10 µm (incl. software ±5 µm) |  |  |  |  |  |  |
ACCESSORIES | | | | | | |
High resolution cameras | 3 | 3 | 3 | 3 | 3 |  |
Head mounted cameras (no tool-camera-offset) |  |  |  |  |  | 5 |
Ergonomic SEMI S2 safety cabinet |  |  |  |  |  |  |
Blower and vacuum tool cleaning unit |  |  |  |  |  |  |
CBP Jaw Cleaner (contactless) |  |  |  |  |  |  |
SOFTWARE | | | | | | |
Supports Microsoft Windows |  |  |  |  |  |  |
Easy to learn intuitive graphical user interface |  |  |  |  |  |  |
Minimum number of mouse clicks |  |  |  |  |  |  |
Customizable screens |  |  |  |  |  |  |
Integrated report editor and data export |  |  |  |  |  |  |
Easy data sorting, grouping and filtering |  |  |  |  |  |  |
Integrated SPC and system GR&R analysis |  |  |  |  |  |  |
Multiple languages, multiple user network environment |  |  |  |  |  |  |
Export to PDF, XML, XLS, DOC, and more |  |  |  |  |  |  |
SECS/GEM* |  |  |  |  |  |  |
SERVICES | | | | | | |
Correlation with other bond testers |  |  |  |  |  |  |
Ergonomic layout to SEMI S8 |  |  |  |  |  |  |
CE + EMC compliant |  |  |  |  |  |  |
ISO9001, ISO13485 and ISO14001 certified production |  |  |  |  |  |  |
Calibration jigs and weights (OIMI class M1, NIST class 1) |  |  |  |  |  |  |
1 Phase 100-240VAC 1+N+PE 45-64Hz 5A |  |  |  |  |  |  |
3 Phase 207-528VAC 3+N+PE 50-60Hz 8A |  |  |  |  |  |  |
Compressed air required |  |  |  |  |  |  |
MECHANICAL | | | | | | |
Footprint X (mm) | 620 | 620 | 1300 | 1800 | 1200 | 1200 |
Footprint Y (mm) | 558 | 558 | 935 | 900 | 1200 | 1200 |
Height (mm) | 608 | 608 | 608 | 1100 | 2500 | 2500 |
Weight (± kg) | 80 | 80 | 100 | 160 | 1350 | 1350 |
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