{"id":68111,"date":"2023-06-29T11:48:57","date_gmt":"2023-06-29T11:48:57","guid":{"rendered":"https:\/\/www.xyztec.com\/%e8%a3%bd%e5%93%81\/sigma-efem%e5%af%be%e5%bf%9c%e3%83%a2%e3%83%87%e3%83%ab\/"},"modified":"2024-04-08T11:33:21","modified_gmt":"2024-04-08T11:33:21","slug":"sigma-efem%e5%af%be%e5%bf%9c%e3%83%a2%e3%83%87%e3%83%ab","status":"publish","type":"page","link":"https:\/\/www.xyztec.com\/ja\/%e8%a3%bd%e5%93%81\/sigma-efem%e5%af%be%e5%bf%9c%e3%83%a2%e3%83%87%e3%83%ab\/","title":{"rendered":"Sigma EFEM\u5bfe\u5fdc\u30e2\u30c7\u30eb"},"content":{"rendered":"\t\t
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Sigma EFEM<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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Equipment
Front End
Module<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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Sigma EFEM<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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Equipment Front End Module<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\n\t\t\t\t\t\n\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\u304a\u554f\u5408\u305b\u306f\u3053\u3061\u3089<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\u534a\u5c0e\u4f53\u5f8c\u5de5\u7a0b\u8acb\u8ca0OSAT\u306e\u4e16\u754c\u30c8\u30c3\u30d7\uff14\u793e\u306b\u7d0d\u5165\u5b9f\u7e3e<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\u30de\u30cb\u30e5\u30a2\u30eb\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u304c\u56f0\u96e3\u306a\u30a6\u30a7\u30cf\u306b\u5bfe\u5fdc\u3059\u308b\u30cf\u30f3\u30c9\u30e9\u30fc\u4ed8\u30b7\u30b9\u30c6\u30e0\u3002EFEM\u5bfe\u5fdc\u3092\u542b\u3080\u5404\u7a2e\u30cf\u30f3\u30c9\u30e9\u30fc\u306b\u3088\u308b\u5b8c\u5168\u81ea\u52d5\u5316\u306b\u3082\u5bfe\u5fdc\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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  • 2\u201d – 12\u201d \u30a4\u30f3\u30c1\u30a6\u30a7\u30cf\u5bfe\u5fdc\uff08\u6700\u5927 300 mm)<\/li>\n
  • \u30d0\u30f3\u30d7\u30b7\u30a7\u30a2\u3001\u30c4\u30a3\u30fc\u30b6\u30fc\u30d7\u30eb (CBP) \u306b\u5bfe\u5fdc<\/li>\n
  • X\u8ef8: 600mm, Y\u8ef8: 370 mm<\/li>\n
  • \u6e2c\u5b9a\u7bc4\u56f2\uff1a1gf – 10 kgf<\/li>\n
  • \u6700\u5c0f\u30d0\u30f3\u30d7\u30b5\u30a4\u30ba\u9593\u30d4\u30c3\u30c1\uff1a 20 \u00b5m<\/li>\n<\/ul>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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    \n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"Intelligent\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u5236\u5fa1\u30ea\u30d5\u30c8\u30d4\u30f3<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    PID\u5236\u5fa1\u306e\u30ea\u30d5\u30c8\u30d4\u30f3\u306b\u3088\u308a\u3001\u69d8\u3005\u306a\u72b6\u614b\u306e\u30a6\u30a7\u30cf\u3092\u9069\u5207\u306b\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u3057\u307e\u3059\u3002\u30ed\u30fc\u30c7\u30a3\u30f3\u30b0\u3001\u30af\u30e9\u30f3\u30d7\u3001\u30a2\u30f3\u30ed\u30fc\u30c7\u30a3\u30f3\u30b0\u306e\u5168\u3066\u306e\u30b7\u30fc\u30b1\u30f3\u30b9\u306b\u304a\u3044\u3066\u30d4\u30f3\u306e\u5ea7\u6a19\u3092\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u3057\u3001\u771f\u7a7a\u3092\u6700\u9069\u306a\u72b6\u614b\u3067\u5236\u5fa1\u3057\u307e\u3059\u3002<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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    \u30a6\u30a7\u30cf\u30d7\u30c3\u30b7\u30e3\u30fc
    <\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u53cd\u308a\u306e\u5927\u304d\u306a\u30a6\u30a7\u30cf\u7528\u306b\u3001\u30a6\u30a7\u30cf\u3092\u30c1\u30e3\u30c3\u30af\u306b\u5438\u7740\u3055\u305b\u308b\u30d7\u30c3\u30b7\u30e3\u30fc\u30e6\u30cb\u30c3\u30c8\u3092\u30aa\u30d7\u30b7\u30e7\u30f3\u3067\u3054\u7528\u610f\u3057\u307e\u3057\u305f\u3002\u9ad8\u3044\u5438\u5f15\u529b\u306b\u3088\u308a\u30a6\u30a7\u30cf\u3092\u3057\u3063\u304b\u308a\u3068\u5438\u7740\u3057\u307e\u3059\u3002<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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    \u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u30aa\u30d7\u30b7\u30e7\u30f3<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u30a6\u30a7\u30cf\u4e0a\u306e\u6e2c\u5b9a\u5f8c\u306e\u6b8b\u6e23\u7528\u306e\u30d6\u30ed\u30a2\u2015\/\u771f\u7a7a\u5438\u7740\u30e6\u30cb\u30c3\u30c8\u3084\u3001\u30a6\u30a7\u30cf\u30c1\u30e3\u30c3\u30af\u7528\u306e\u30ed\u30fc\u30e9\u30fc\u30af\u30ea\u30fc\u30ca\u30fc\u306b\u3088\u308a\u30af\u30ea\u30fc\u30f3\u306a\u74b0\u5883\u3092\u7dad\u6301\u3057\u307e\u3059\u3002\uff08\u30aa\u30d7\u30b7\u30e7\u30f3\uff09<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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    \n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"Panel\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u771f\u7a7a\u30c1\u30e3\u30c3\u30af\u5f0f\u30ef\u30fc\u30af\u30db\u30eb\u30c0<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u6700\u5927300mm\u306e\u30a6\u30a7\u30cf\u7b49\u306b\u5bfe\u5fdc\u3059\u308b\u771f\u7a7a\u30c1\u30e3\u30c3\u30af\u5f0f\u30ef\u30fc\u30af\u30db\u30eb\u30c0\u3002XY\u30b9\u30c6\u30fc\u30b8\u306e\u5e83\u7bc4\u56f2\u53ef\u52d5\u7bc4\u56f2\u306b\u3088\u308a\u3001\u30b5\u30f3\u30d7\u30eb\u306e\u5168\u57df\u3092\u6e2c\u5b9a\u53ef\u80fd\u3002<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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    \u30a6\u30a7\u30cf\u30de\u30c3\u30d7\u30d5\u30a1\u30a4\u30eb\u306e\u30a4\u30f3\u30dd\u30fc\u30c8<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    KLARF, (S)INF, G85 \u7b49\u306e\u30a6\u30a7\u30cf\u30de\u30c3\u30d7\u30d5\u30a1\u30a4\u30eb\u306e\u30a4\u30f3\u30dd\u30fc\u30c8\u306b\u5bfe\u5fdc\u3002\u6e2c\u5b9a\u5bfe\u8c61\u306e\u30d0\u30f3\u30d7\u3084\u4e0d\u826f\u500b\u6240\u3092\u628a\u63e1\u3057\u901f\u3084\u304b\u306b\u6e2c\u5b9a\u3084\u4e0d\u826f\u30d0\u30f3\u30d7\u306e\u9664\u53bb\u4f5c\u696d\u3092\u5b9f\u65bd\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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    \u30b7\u30a7\u30a2\u5f8c\u306e\u30d0\u30f3\u30d7\u6b8b\u6e23\u9664\u53bb<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u4e0d\u826f\u30d0\u30f3\u30d7\u306e\u9664\u53bb\u306b\u3082\u5bfe\u5fdc\u3002\u30a6\u30a7\u30cf\u30de\u30c3\u30d7\u304b\u3089\u306e\u4e0d\u826f\u30d0\u30f3\u30d7\u306e\u5ea7\u6a19\u60c5\u5831\u3092\u5143\u306b\u3001\u4e0d\u826f\u30d0\u30f3\u30d7\u307e\u3067\u30b7\u30a7\u30a2\u30c4\u30fc\u30eb\u3092\u81ea\u52d5\u7684\u306b\u79fb\u52d5\u3002<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"

    Sigma EFEM Equipment Front End […]<\/p>\n","protected":false},"author":29,"featured_media":0,"parent":62750,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"elementor_header_footer","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-68111","page","type-page","status-publish","hentry"],"acf":[],"yoast_head":"\nEFEM\u30cf\u30f3\u30c9\u30e9\u30fc\u306b\u3088\u308a\u5b8c\u5168\u81ea\u52d5\u3067\u30a6\u30a7\u30cf\u306e\u5404\u7a2e\u5f37\u5ea6\u6e2c\u5b9a\u306b\u5bfe\u5fdc<\/title>\n<meta name=\"description\" content=\"\u30e2\u30c7\u30ebW12\u306bEFEM\u30cf\u30f3\u30c9\u30e9\u30fc\u3092\u8ffd\u52a0\u3059\u308b\u3053\u3068\u3067\u5b8c\u5168\u81ea\u52d5\u30c6\u30b9\u30c8\u306b\u5bfe\u5fdc\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.xyztec.com\/ja\/%e8%a3%bd%e5%93%81\/sigma-efem%e5%af%be%e5%bf%9c%e3%83%a2%e3%83%87%e3%83%ab\/\" 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