Sigma W12

Wafer
bond tester

Sigma W12
Sigma W12

Sigma W12

Wafer bond tester

Bond tester for wafers 2 - 12 inch

  • Bondtester for wafers or at wafer level 2” — 12” (up to 300 mm)
  • Precise testing and Cold Bump Pull (CBP) testing
  • Large X/Y stages X: 600mm, Y: 370 mm
  • Force range from 1gf — 10 kgf
  • Bump pitch down to 20 µm
Panel chuck work holder

Panel chuck work holder

Vacuum work holder for panels or wafers up to 300 mm. Easily reach 100% of a 300 mm panel without repositioning your sample on the chuck. The wafer chuck work holder comes with safety interlocks and 360° rotation.

Wafer pusher

Wafer pusher

In cases of extreme warpage, an optional wafer pusher ensures precise clamping. The high airflow of vacuum chucks pulls down wafers. 

Wafer cleaning unit

Wafer cleaning unit

Keep test debris away from the wafer or the wafer chuck with a blower and vacuum cleaner or a roller with sticky foil, for pre- and post-cleaning.

Rorze mit W12 V2

Wafer/panel handler (EFEM)

Integration transforms the bond tester into a fully automated system. We offer various types of wafer handlers (Equipment Front End Module), for operator-free bond testing.

Lift pins

Intelligent lift pins

Gently secure flat and warped wafers because of the soft, flexible tips on the PID controlled wafer lift pins. Vacuum sensing and switching are intelligently timed with the lift pin position throughout the load, clamp, and unload cycle.

Wafer-map-import

Substrate wafer map import

Easily import and export multiple file formats for wafer maps such as KLARF, (S)INF, G85, and others for full traceability. Defects or test positions are shown in an overview and are directly accessible for testing or analysis.

Big bump removal

Big bump removal

Automatically shear the big bumps and clean the debris to prepare for wafer probing. Fully programmable vision algorithms can check if the removal of big bumps was successful.

Cold-Bum-Pull-Jaw-Cleaner

CBP Jaw Cleaner

The solder that builds up in the cavity of the Cold Bump Pull (CBP) jaw reduces the gripping efficiency. This contactless cavity cleaner melts the solder with a high temperature and high-pressure air jet and then blows it into a fine matrix where it is absorbed.

Full automation

Eliminate human error and save production costs.

  • Robotic handlers
  • Easy programming
  • Smart vision cameras
  • Tool alignment
  • Fiducial recognition
  • Wire detection
  • Grading run
  • Auto grading
  • Image measurement (AOI)
  • Data communication

Handlers

Robotic handling ensures safe load and unload of applications and avoids handling error and damage. We offer handlers for:

  • Wafers (EFEM)
  • Waffle trays
  • Magazines

Easy programming

The open Sigma software enables easy programming of total automation steps, positions, and commands. The automation editor employs camera visualization and intelligent wizards.

Smart vision cameras

See the unseen with up to 3 live camera options. Bring out the features of interest with images or videos using high-resolution cameras, flexible LED illumination, and fantastic image processing options.

Tool alignment

Precise tool alignment is essential to test the correct bonds correctly. We offer several solutions for perfect alignment:
  • Self-aligning shear tool
  • Deep access
  • Revolving Measurement Unit
  • Concentricity correction

Fiducial recognition

Define recognizable shapes, patterns, or marks as a global or local reference for positioning and automatic tool alignment.

Wire dection

Recognition of components and fine pitch wires that are swept out of position due to process tolerances or part handling.

Grading run

A Sigma offers 2 alternatives to make grading more efficient and consistent:

  • The operator does all the gradings in one step after a sequence of tests, using the microscope or an offset camera.
  • A Sigma can take it one step further and make automatic determinations of the failure modes (auto grading).

Auto grading

Automatically grade the failure modes of the test result images with grading assistance. Optical inspection calculates the area of bulk material remaining as a percentage of the whole.

Image measurement (AOI)

Detailed optical inspection helps you to perform image measurements or to identify the failure modes of the captured test results. For more advanced image processing, filtering, segmentation, and detection of shapes, you can use Automated Optical Inspection (AOI).

Data export

Improve data processing using automatic export and SECS/GEM for tracking and control.

RMU

No more cartridge
exchanges

The Revolving Measurement Unit (RMU) houses up to 6 flexible sensors that are configurable with various pull, peel, push, or shear tools. This enables continuous testing up to 200 kgf.

RMU

No more cartridge
exchanges

The Revolving Measurement Unit (RMU) houses up to 6 flexible sensors that are configurable with various pull, peel, push, or shear tools. This enables continuous testing up to 200 kgf.

Control your alignment

Multiple ways to test, requires for different test tools. Besides a wide range of standard pull, peel, push or shear tools we design custom solutions to fulfill all test requirements.

Tweezers

You can control the gripping force and the opening and closing position. There is a choice of 3 types of tweezers:
  • Electric (USB)
  • Mechanical
  • Pneumatic

Control your alignment

Multiple ways to test, requires for different test tools. Besides a wide range of standard pull, peel, push or shear tools we design custom solutions to fulfill all test requirements.
Tools-Top
Tools-Bottom

Tweezers

You can control the gripping force and the opening and closing position. There is a choice of 3 types of tweezers:
  • Electric (USB)
  • Mechanical
  • Pneumatic
Tools-Bottom
Your sample fits, too!

Your sample fits, too!

  • Quick release work holders
  • Maximize your throughput
  • Accurate alignment
  • Wide selection and customized clamping solutions
  • High axis speed, direct-drive motor, linear encoders
  • Secure lock maintains reproducible positioning
Your sample fits, too!
Your sample fits, too!

Your sample fits, too!

  • Quick release work holders   
  • Maximize your throughput    
  • Accurate alignment
  • Wide selection and customized clamping solutions
  • High axis speed, direct-drive motor, linear encoders
  • Secure lock maintains reproducable positioning
Love Sigma Bond Tester

A pleasure to set up

  • Easy sample access
  • Flexible LED lighting options
  • Designed with the operators in mind
  • Adjustable microscope
  • No stress working conditions
Peddle Sigma

Easy to use for everyone

  • Flexible on-board Statistical Process Control (SPC) analysis
  • Unique form features for SPC management
  • Software has Easy and Expert modes
  • Control chart and real-time force graphs
  • Flexible export and SECS/GEM
Modular by design

Modular by design

  • Customized tools and work holders
  • Operator free loading options
  • Powerful camera options
Love Sigma Bond Tester

A pleasure to
set up

  • Easy sample access
  • Flexible LED lighting options
  • Designed with the operators in mind
  • Adjustable microscope
  • No stress working conditions
SPC-screen

Easy to use
for everyone

  • Flexible on-board Statistical Process Control (SPC) analysis
  • Unique form features for SPC management
  • Software has Easy and Expert modes
  • Control chart and real-time force graphs
  • Flexible export and SECS/GEM
Modular by design

Modular by
design

  • Customized tools and work holders
  • Operator free loading options
  • Powerful camera options

Specifications Sigma W12

STAGESSIGMA W12
X-stage (mm)500
Y-stage (mm)370
Z-stage (mm)90
Axis speed (mm/s)50
Resolution linear encoders (backlash free drives) (nm)30
Digital temperature correctionStandard
ACCURACY
Accuracy (%)0.075
ADC resolution (bit)24
Sampling frequency (kHz)10
Shear height (step back) accuracy ±1 μmStandard
Programmable landing force down to 5 gfStandard
MECHANICAL
Footprint X (mm)1300
Footprint Y (mm)935
Height (mm)608
Weight (± kg)100

Please contact us for more information and options for your factory. Specifications are subject to change without prior notice.

   Standard
   Optional
   Not available

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Dirk Schade