{"id":68107,"date":"2023-06-29T11:37:53","date_gmt":"2023-06-29T11:37:53","guid":{"rendered":"https:\/\/www.xyztec.com\/%e4%ba%a7%e5%93%81%e7%ba%bf\/sigma-efem\/"},"modified":"2024-04-08T11:32:54","modified_gmt":"2024-04-08T11:32:54","slug":"sigma-efem","status":"publish","type":"page","link":"https:\/\/www.xyztec.com\/zh-hans\/%e4%ba%a7%e5%93%81%e7%ba%bf\/sigma-efem\/","title":{"rendered":"Sigma EFEM"},"content":{"rendered":"\t\t
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Sigma EFEM<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\u8bbe\u5907\u524d\u7aef\u81ea\u52a8\u5316\u6a21\u5757(\u6676\u5706\u4f20\u9001\u8bbe\u5907)<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\n\t\t\t\t\t\n\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\u8054\u7edc\u4e1a\u52a1<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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Sigma EFEM<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\u8bbe\u5907\u524d\u7aef\u81ea\u52a8\u5316\u6a21\u5757(\u6676\u5706\u4f20\u9001\u8bbe\u5907)<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\n\t\t\t\t\t\n\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\u8054\u7edc\u4e1a\u52a1<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\u88ab\u9009\u5165\u5168\u7403\u524d\u56db\u5927\u534a\u5bfc\u4f53\u5c01\u88c5\u5382\u4e3b\u8981\u4f9b\u8d27\u5546<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\u900f\u8fc7\u4e0eEFEM\u6574\u5408\u5c06\u63a8\u62c9\u529b\u6d4b\u8bd5\u673a\u8f6c\u53d8\u4e3a\u5168\u81ea\u52a8\u5316\u7cfb\u7edf.\u6211\u4eec\u63d0\u4f9b\u591a\u79cd\u4e0d\u540c\u7684\u6676\u5706\u4f20\u9001\u8bbe\u5907\u4e0eSigma W12<\/a>\u6574\u5408,\u6765\u5b9e\u73b0\u65e0\u4eba\u5316\u7684\u6d4b\u8bd5\u4f5c\u4e1a.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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  • \u6676\u5706\u5c3a\u5bf8 2\u201d \u2013 12\u201d (up to 300 mm)<\/li>\n
  • \u5168\u81ea\u52a8\u5316\u63a8\u529b\u6d4b\u8bd5\u548c\u62c9\u7403(CBP)\u6d4b\u8bd5<\/li>\n
  • \u5927\u578b\u8f7d\u53f0 X\/Y \u5e73\u53f0 X\u8f74: 600mm, Y\u8f74: 370 mm<\/li>\n
  • \u6700\u5927\u63a8\u529b\u8303\u56f4 1gf \u2013 10 kgf<\/li>\n
  • \u6700\u5c0f\u53ef\u6d4bBump \u95f4\u8ddd\u7ea6 20 \u00b5m<\/li>\n<\/ul>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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    \n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"Intelligent\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u667a\u80fd\u578b\u5347\u964d\u9876\u9488<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u53ef\u4ee5\u8f7b\u8f7b\u7684\u56fa\u5b9a\u5e73\u5766\u6216\u8005\u662f\u7fd8\u66f2\u7684\u6676\u5706.<\/p>\n

    \u4e3b\u8981\u662f\u56e0\u4e3a\u6709PID\u63a7\u5236\u5177\u67d4\u8f6f\u548c\u5f39\u6027\u672b\u68a2\u7684\u9876\u9488\u6267\u884c\u5347\u964d<\/p>\n

    \u5728\u6574\u4e2a\u6676\u5706\u4e0a\u6599,\u56fa\u5b9a,\u4e0b\u6599\u5468\u671f\u4e2d, \u5176\u4e2d\u771f\u7a7a\u7684\u611f\u5e94\u548c\u5207\u6362\u88ab\u806a\u660e\u7684\u7ed3\u5408\u4e86\u5347\u964d\u9876\u9488\u7684\u4f4d\u7f6e.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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    \n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"Wafer\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u6676\u5706\u7fd8\u66f2\u4e0b\u538b\u88c5\u7f6e
    <\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u9488\u5bf9\u6781\u5ea6\u7fd8\u66f2\u7684\u6848\u4f8b,\u53ef\u4ee5\u9009\u914d\u6676\u5706\u7fd8\u66f2\u4e0b\u538b\u88c5\u7f6e\u6765\u786e\u4fdd\u7cbe\u51c6\u7684\u56fa\u5b9a.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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    \n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"Wafer\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u6676\u5706\u6e05\u6d01\u5355\u5143<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u4e3a\u4e86\u4fdd\u6301\u5f02\u7269\u8fdc\u79bb\u6676\u5706\u6216\u8005\u662f\u6676\u5706\u5de5\u4f5c\u5e73\u53f0. \u6211\u4eec\u53ef\u4ee5\u5229\u7528\u5439\u6c14\u88c5\u7f6e\u4e0e\u771f\u7a7a\u5438\u9644\u88c5\u7f6e. \u6216\u662f\u5229\u7528\u6cbe\u9ecf\u6eda\u8f6e\u5728\u6d4b\u8bd5\u4e4b\u524d\u6216\u6d4b\u8bd5\u4e4b\u540e\u8fdb\u884c\u6e05\u6d01<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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    \n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"Panel\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u9762\u677f\u578b\u5de5\u4f5c\u5e73\u53f0<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u9488\u5bf9300mm\u9762\u677f\u6216\u662f\u6676\u5706\u4ea7\u54c1\u7684\u771f\u7a7a\u5939\u5177. \u53ef\u4ee5100%\u8f7b\u6613\u5230\u8fbe300mm\u9762\u677f\u7684\u4efb\u4f55\u4e00\u4e2a\u4f4d\u7f6e\u4e0d\u9700\u8981\u5728\u5e73\u53f0\u4e0a\u4ece\u65b0\u5bf9\u4f4d\u4f60\u7684\u6837\u54c1.\u6676\u5713\u627f\u8f09\u5e73\u53f0\u5e36\u6709\u5b89\u5168\u4e92\u9396\u88dd\u7f6e\uff0c\u53ef360\u5ea6\u65cb\u8f49\u3002<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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    \n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"Wafer\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    Wafer MAP \u5bfc\u5165<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u8f7b\u677e\u8f93\u5165\u6216\u8f93\u51fa\u4e0d\u540cwafer map\u6587\u4ef6\u683c\u5f0f,\u4f8b\u5982: KLARF, (S)INF, G85,\u6216\u662f\u5176\u4ed6\u683c\u5f0f\u8ba9\u4f60\u53ef\u4ee5\u5b8c\u6574\u5730\u8ffd\u6eaf. \u7f3a\u9677\u6216\u6d4b\u8bd5\u4f4d\u7f6e\u663e\u793a\u5728wafer map\u4e2d\uff0c\u76f4\u63a5\u70b9\u53d6\u753b\u9762\u53ef\u81ea\u52a8\u79fb\u52a8\u81f3\u70b9\u9009\u4f4d\u7f6e\u6765\u8fdb\u884c\u6d4b\u8bd5\u6216\u5206\u6790\u3002<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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    \n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"Big\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u5f02\u5e38\u6865\u63a5big bump \u79fb\u9664(\u9009\u914d)<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \u81ea\u52a8\u63a8\u9664\u5f02\u5e38\u6865\u63a5\u7684big bump\u5e76\u6e05\u9664\u6b8b\u9521,\u4ee5\u907f\u514d\u6676\u5706\u63a2\u9488\u6d4b\u8bd5\u7684\u635f\u574f.<\/p>\n

    \u5b8c\u5168\u53ef\u7f16\u7a0b\u7684\u89c6\u89c9\u7b97\u6cd5,\u53ef\u4ee5\u68c0\u67e5\u53bb\u9664big bump\u662f\u5426\u6210\u529f<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"

    Sigma EFEM \u8bbe\u5907\u524d\u7aef\u81ea\u52a8\u5316\u6a21\u5757(\u6676\u5706\u4f20\u9001\u8bbe\u5907) \u8054 […]<\/p>\n","protected":false},"author":29,"featured_media":0,"parent":62742,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"elementor_header_footer","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-68107","page","type-page","status-publish","hentry"],"acf":[],"yoast_head":"\n\u4f7f\u7528EFEM\u8fdb\u884c\u65e0\u64cd\u4f5c\u5458\u7684\u6676\u5706\u6d4b\u8bd5<\/title>\n<meta name=\"description\" content=\"\u4f7f\u7528\u5ba2\u5236\u7684EFEM\uff08\u8bbe\u5907\u524d\u7aef\u81ea\u52a8\u5316\u6a21\u5757\uff09\u6676\u5706\u4f20\u9001\u8bbe\u5907\uff0c\u5c06Sigma W12\u63a8\u62c9\u529b\u6d4b\u8bd5\u673a\u8f6c\u53d8\u4e3a\u5168\u81ea\u52a8\u7cfb\u7edf\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.xyztec.com\/zh-hans\/%e4%ba%a7%e5%93%81%e7%ba%bf\/sigma-efem\/\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u4f7f\u7528EFEM\u8fdb\u884c\u65e0\u64cd\u4f5c\u5458\u7684\u6676\u5706\u6d4b\u8bd5\" \/>\n<meta property=\"og:description\" content=\"\u4f7f\u7528\u5ba2\u5236\u7684EFEM\uff08\u8bbe\u5907\u524d\u7aef\u81ea\u52a8\u5316\u6a21\u5757\uff09\u6676\u5706\u4f20\u9001\u8bbe\u5907\uff0c\u5c06Sigma W12\u63a8\u62c9\u529b\u6d4b\u8bd5\u673a\u8f6c\u53d8\u4e3a\u5168\u81ea\u52a8\u7cfb\u7edf\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.xyztec.com\/zh-hans\/%e4%ba%a7%e5%93%81%e7%ba%bf\/sigma-efem\/\" \/>\n<meta property=\"og:site_name\" content=\"Xyztec\" \/>\n<meta property=\"article:modified_time\" content=\"2024-04-08T11:32:54+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.xyztec.com\/wp-content\/uploads\/2023\/06\/Intelligent-Lift-pins.jpg\" 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