規格

Sigma

	SIGMA LITE	SIGMA	SIGMA W12	SIGMA MAG	SIGMA HF
FORCE SENSORS
Revolving Measurement Unit (RMU) up to 6 sensors (kgf)	100	200	10	200
Single Measurement Unit (SMU) 1 sensor up to (kgf)	100	200	10	200	1000
STAGES
X-stage (mm)	168	370	500	600	500
Y-stage (mm)	168	168	370	168	500
Z-stage (mm)	168	168	90	168	200
Axis speed (mm/s)	5	50	50	50	500
Resolution linear encoders (backlash free drives) (nm)	30	30	30	30	10
Digital temperature correction
ACCURACY
Accuracy (%)	0.2	0.075	0.075	0.075	1
ADC resolution (bit)	16	24	24	24	24
Sampling frequency (kHz)	2	10	10	10	10
Shear height (step back) accuracy ±1 μm
Nano control shear height sensor precision down to 200 nm
Programmable landing force down to 5 gf
1° sensor rotation resolution
Tool rotation accuracy ±10 µm (incl. software ±5 µm)
ACCESSORIES
High resolution cameras	3	3	3	3
Head mounted cameras (no tool-camera-offset)					5
Ergonomic SEMI S2 safety cabinet
Blower and vacuum tool cleaning unit
CBP Jaw Cleaner (contactless)
SOFTWARE
Supports Microsoft Windows
Easy to learn intuitive graphical user interface
Minimum number of mouse clicks
Customizable screens
Integrated report editor and data export
Easy data sorting, grouping and filtering
Integrated SPC and system GR&R analysis
Multiple languages, multiple user network environment
Export to PDF, XML, XLS, DOC, and more
SECS/GEM*
SERVICES
Correlation with other bond testers
Ergonomic layout to SEMI S8
CE + EMC compliant
ISO9001, ISO13485 and ISO14001 certified production
Calibration jigs and weights (OIMI class M1, NIST class 1)
1 Phase 100-240VAC 1+N+PE 45-64Hz 5A
3 Phase 207-528VAC 3+N+PE 50-60Hz 8A
Compressed air required
MECHANICAL
Footprint X (mm)	620	620	1300	1800	1200
Footprint Y (mm)	558	558	935	900	1200
Height (mm)	608	608	608	1100	2500
Weight (± kg)	80	80	100	160	1350