| SIGMA LITE | SIGMA | SIGMA W12 | SIGMA MAG | SIGMA HF | SIGMA NANO HA | |
|---|---|---|---|---|---|---|
| FORCE SENSORS | ||||||
| Revolving Measurement Unit (RMU) up to 6 sensors (kgf) | 100 | 200 | 10 | 200 |  | 200 |
| Single Measurement Unit (SMU) 1 sensor up to (kgf) | 100 | 200 | 10 | 200 | 1000 | 200 |
| STAGES | ||||||
| X-stage (mm) | 168 | 370 | 500 | 600 | 500 | 500 |
| Y-stage (mm) | 168 | 168 | 370 | 168 | 500 | 500 |
| Z-stage (mm) | 168 | 168 | 90 | 168 | 200 | 150 |
| Axis speed (mm/s) | 5 | 50 | 50 | 50 | 250 | 500 |
| Resolution linear encoders (backlash free drives) (nm) | 30 | 30 | 30 | 30 | 10 | 10 |
| Digital temperature correction |  | | | | | |
| ACCURACY | ||||||
| Accuracy (%) | 0.2 | 0.075 | 0.075 | 0.075 | 1 | 0.075 |
| ADC resolution (bit) | 16 | 24 | 24 | 24 | 24 | 24 |
| Sampling frequency (kHz) | 2 | 10 | 10 | 10 | 10 | 10 |
| Shear height (step back) accuracy ±1 μm | | | | | | |
| Nano control shear height sensor precision down to 200 nm |  | | | | | |
| Programmable landing force down to 5 gf | | | | | | |
| 1° sensor rotation resolution | | | | | | |
| Tool rotation accuracy ±10 µm (incl. software ±5 µm) | | | | | | |
| ACCESSORIES | ||||||
| High resolution cameras | 3 | 3 | 3 | 3 | | 3 |
| Head mounted cameras (no tool-camera-offset) | | | | | 5 | |
| Ergonomic SEMI S2 safety cabinet | | | | | | |
| Blower and vacuum tool cleaning unit | | | | | | |
| CBP Jaw Cleaner (contactless) | | | | | | |
| SOFTWARE | ||||||
| Supports Microsoft Windows | | | | | | |
| Easy to learn intuitive graphical user interface | | | | | | |
| Minimum number of mouse clicks | | | | | | |
| Customizable screens | | | | | | |
| Integrated report editor and data export | | | | | | |
| Easy data sorting, grouping and filtering | | | | | | |
| Integrated SPC and system GR&R analysis | | | | | | |
| Multiple languages, multiple user network environment | | | | | | |
| Export to PDF, XML, XLS, DOC, and more | | | | | | |
| SECS/GEM* | | | | | | |
| SERVICES | ||||||
| Correlation with other bond testers | | | | | | |
| Ergonomic layout to SEMI S8 | | | | | | |
| CE + EMC compliant | | | | | | |
| ISO9001, ISO13485 and ISO14001 certified production | | | | | | |
| Calibration jigs and weights (OIMI class M1, NIST class 1) | | | | | | |
| 1 Phase 100-240VAC 1+N+PE 45-64Hz 5A | | | | | | |
| 3 Phase 207-528VAC 3+N+PE 50-60Hz 8A | | | | | | |
| Compressed air required | | | | | | |
| MECHANICAL | ||||||
| Footprint X (mm) | 620 | 620 | 1300 | 1800 | 1250 | 1250 |
| Footprint Y (mm) | 558 | 558 | 935 | 900 | 1250 | 1250 |
| Height (mm) | 608 | 608 | 608 | 1100 | 2500 | 2500 |
| Weight (± kg) | 80 | 80 | 100 | 160 | 1750 | 1750 |
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