| STAGES | SIGMA MAG |
|---|---|
| X-stage (mm) | 600 |
| Y-stage (mm) | 168 |
| Z-stage (mm) | 168 |
| Axis speed (mm/s) | 50 |
| Resolution linear encoders (backlash free drives) (nm) | 30 |
| Digital temperature correction | |
| ACCURACY | |
| Accuracy (%) | 0.075 |
| ADC resolution (bit) | 24 |
| Sampling frequency (kHz) | 10 |
| Shear height (step back) accuracy ±1 μm | |
| Programmable landing force down to 5 gf | |
| MECHANICAL | |
| Footprint X (mm) | 1800 |
| Footprint Y (mm) | 900 |
| Height (mm) | 1100 |
| Weight (± kg) | 160 |

Clyde Chen