Tool alignment

Automatic testing

Automation Toolalignment

Test the correct bonds correctly

Precise tool alignment is essential to test the correct bonds correctly. Concentricity correction achieves tool eccentricities less than 5 µm, and unique tool designs can be of help during alignment.

 

We offer solutions in customized hook foot lengths or a self-aligning shear tool, which corrects for any tiny but important angular difference between tool and sample.

 

Using the camera and deep access tooling allows you to test complex sample architecture. And you can easily switch between different tools in seconds with our unique rotating 6-in-1 test head RMU.

Tool alignment
Hook concentricity correction
Shear concentricity correction

Tool concentricity correction

Tolerances in the production process of both the sensors and the tools can create a concentricity offset. The Sigma software compensates this offset and corrects the concentricity to ensure the tool-position meets the center when a tool rotates.

 

There are 3 ways to compensate the tolerances and concentricity for shear and pull tools using the software correction wizard:

  • Manual alignment
  • With imprints using soft clay
  • Automated correction with computer vision

 

Software correction is more consistent and more accurate to achieve eccentricities less than 5 µm. However, mechanical adjustment is the best way to fix wire hook concentricity. 

Self-aligning shear tool

A patented tool to shear large or stacked dies, as the strength of the bond is in proportion to the area of the die, but the area available to apply the shear load is limited. A vacuum mount holds a soft material shear block in place and rotates slightly (self-alignment). Surface irregularities between the edge of the die and the tooltip result in multiple smaller points of contact. The soft material of the shear block deforms at these points. This deformation considerably reduces the high contact stresses that would cause the die to fail.
Self aligning shear tool 1
Controlled shear height
Self aligning shear block
Deep access alignment

Deep access

When parts of the sample obstruct optical access from microscope to test point, special deep access tooling and flexible cameras enable testing of complex sample architectures. The standard Sigma and the floor standing HF offer 50 mm and 80 mm of deep access, respectively, maintaining clear visual access too.

Revolving Measurement Unit (RMU)

Quickly and easily select the correct tool from the Revolving Measurement Unit (RMU). The RMU switches between 6 housed sensors and goes to a maximum of 200 kgf. Any combination of pull, push, and shear sensors, including USB Tweezers is possible.

Revolving measurement unit
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Herbert Stuermann